SEMICAPS INNOVATIONS

 

Solid Immersion Lens (SIL)

SEMICAPS has recently developed the Solid Immersion Lens (SIL) to improve and enhance the resolution and magnification for the laser scanned images from our SOM. The SIL mechanism can be easily adapted to our analytical or inverted SOM and its operation is via motorized and software controlled.
 

 

Wafer Stage

SEMICAPS wafer stage comprises a platform for supporting a wafer such that a backside of the wafer is suspended above a cavity of the platform. This method leverages on a wafer level laser diagnostic setup without the need for customised probe card.
 


 
 

 


 


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