OPTICAL FAULT LOCALIZATION SYSTEM

SEMICAPS PEM

Main applications for the Photon Emission Microscope is to locate failures like leaky junctions, contact spiking (due to ESD), latch-up, oxide breakdown, and other current leakage phenomena that produce light emissions.


Classifications of Emissions
- Emissions that represent a weakness of the junctions
- Oxide leakage
- Latch-up
- Hot electron
- Emissions that are artifacts of design or test conditions
- Forward/reverse biased diodes
- Saturated MOS transistors
- Floating gates
- Emissions that are non detectable
- Buried junctions
- Non emitting leakage sites
- Ohmic shorts
- Shorted metal interconnects




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