HIGHLY AUTOMATED SYSTEM
The SEMICAPS PEM series have been designed for high automation of
hardware and software and also the ability to switch over to manual
control when desired.
Computer Controlled XYZ Stage
Stage movement is fully controlled from the computer console via the
X, Y and Z buttons on the software or by joystick control. A rapid
image shift is enabled by double-clicking on the image displayed
live on the window.
Detectors and optics are automatically moved into and out of
position from the optical path depending on the imaging mode (Live
or Capture) chosen.
NIR Filter: Key to Backside Imaging
On selecting Backside Imaging, the NIR filter automatically
positions into the optical path.
SOFTWARE USER INTERFACE
User-friendly Software SPEMS Windows-based system software includes
real-time frontside and backside imaging, image acquisition and
overlay, image processing and annotation, image data attachment,
thumbnail browsing, pseudo-coloring and other functions that
simplify the system operations.
Live Navigation Window
The SEMICAPS SPEMS series enables live stage navigation on the
window with its dual camera system. The DUT can be
continuously monitored and inspected without opening the light-tight
Local Coordinates Registration
A standard feature in the software, the coordinate registration
system enables users to interface with almost any third party CAD
software (eg, Knights).
Par Center and Par Focus
Par center and par focus are software corrected so that the image
center and focus do not change with different objectives.
Image Processing and Annotation
Extensive tools like image processing, annotation and customized
data reports are available in the software thus eliminating the need
for third party software.
REAL-TIME BACKSIDE IMAGING
With an automated removable NIR filter, optimized optics and light
source, SEMICAPS SPEMS series offer both frontside and backside
imaging as standard features in one integrated system.