OPTICAL FAULT LOCALIZATION SYSTEM

SEMICAPS SOM


1. Photon Emission Microscopy Option - Integration of PEM camera module onto the SOM system
  - Si-Cooled CCD Camera Module
  - InGaAs Camera Module (TE-Cooled, LN2 Cooled)
  - MCT Camera Module

2. Probe Station Integration Option
  - SEMICAPS Probe Station (300mm)
  - Suss Probe Station
  - Cascade Probe Station
  - Signatone Probe Station

3. Silicon Immersion Lens (SIL) Option

4. Laser Marker Module

5. Heating/Cooling Chucks



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